Assignee
JANSSEN FRANCISCUS JOHANNES JOSEPH
NL·2 granted patents·7 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0179US8451423B2Lithographic apparatus and methodJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2009·Granted May 28, 2013·7 cites·30 claims
- 0253US8817229B2Method of cooling an optical element, lithographic apparatus and method for manufacturing a deviceJANSSEN FRANCISCUS JOHANNES JOSEPH·Filed 2011·Granted Aug 26, 2014·0 cites·21 claims
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