Assignee
JENOPTIK TECHNOLOGIE GMBH
DE·9 granted patents·197 citations·filing 1994–1995
Top patents by PatentIndex Score
9 records- 0179US5655869ADevice for coupling loading and unloading devices with semiconductor processing machinesJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Aug 12, 1997·69 cites·11 claims
- 0265US5581383AArrangement for optical autocorrelationJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Dec 3, 1996·29 cites·7 claims
- 0359US5566023AStepped lens with Fresnel surface structure produced by lithography and process for manufacturing of sameJENOPTIK TECHNOLOGIE GMBH·Filed 1994·Granted Oct 15, 1996·18 cites·5 claims
- 0453US6075880AMethod for detection of defects in the inspection of structured surfacesJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jun 13, 2000·48 cites·22 claims
- 0541US5535250ADevice for manipulating a synchrotron beam bundleJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jul 9, 1996·9 cites·6 claims
- 0635US5715929ACharging device for semiconductor processing installationsJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Feb 10, 1998·9 cites·15 claims
- 0732US5636724ADevice for transferring a transport object between two end positionsJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted Jun 10, 1997·5 cites·16 claims
- 0830US5575372ADevice for preventing shearing or pinching of a foreign objectJENOPTIK TECHNOLOGIE GMBH·Filed 1994·Granted Nov 19, 1996·9 cites·28 claims
- 0921US5515410AIrradiation device for deep x-ray lithographyJENOPTIK TECHNOLOGIE GMBH·Filed 1995·Granted May 7, 1996·1 cites·7 claims
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