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US3 patents

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US8236188B2Aug 7, 2012

Method for low-K dielectric etch with reduced damage

JI BING2 citations59

US8741165B2Jun 3, 2014

Reducing twisting in ultra-high aspect ratio dielectric etch

JI BING0 citations49

US8691701B2Apr 8, 2014

Strip with reduced low-K dielectric damage

JI BING1 citations47