Assignee
JINDAL VIBHU
US·3 granted patents·3 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0177US8734907B2Coating of shield surfaces in deposition systemsJINDAL VIBHU·Filed 2012·Granted May 27, 2014·1 cites·17 claims
- 0268US8734586B2Process for cleaning shield surfaces in deposition systemsJINDAL VIBHU·Filed 2012·Granted May 27, 2014·1 cites·11 claims
- 0361US8399868B2Tools, methods and devices for mitigating extreme ultraviolet optics contaminationJINDAL VIBHU·Filed 2011·Granted Mar 19, 2013·1 cites·20 claims
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