Assignee
JONKERS JEROEN
DE·2 granted patents·12 citations·filing 2005–2009
Top patents by PatentIndex Score
2 records- 0180US8173975B2Method and device for removing particles generated by means of a radiation source during generation of short-wave radiationJONKERS JEROEN·Filed 2005·Granted May 8, 2012·6 cites·20 claims
- 0258US8253123B2Method and device for generating EUV radiation or soft X-rays with enhanced efficiencyJONKERS JEROEN·Filed 2009·Granted Aug 28, 2012·6 cites·15 claims
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