Assignee
JORDAN VALLEY APPLIED RADIATION LTD
IL·30 granted patents·1,493 citations·filing 1998–2006
Top patents by PatentIndex Score
30 records- 0197US7120228B2Combined X-ray reflectometer and diffractometerJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Oct 10, 2006·131 cites·18 claims
- 0296US6556652B1Measurement of critical dimensions using X-raysJORDAN VALLEY APPLIED RADIATION LTD·Filed 2000·Granted Apr 29, 2003·89 cites·40 claims
- 0396US6512814B2X-ray reflectometerJORDAN VALLEY APPLIED RADIATION LTD·Filed 2001·Granted Jan 28, 2003·90 cites·5 claims
- 0495US7110491B2Measurement of critical dimensions using X-ray diffraction in reflection modeJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Sep 19, 2006·57 cites·34 claims
- 0595US6895075B2X-ray reflectometry with small-angle scattering measurementJORDAN VALLEY APPLIED RADIATION LTD·Filed 2003·Granted May 17, 2005·132 cites·23 claims
- 0695US6639968B2X-ray reflectometerJORDAN VALLEY APPLIED RADIATION LTD·Filed 2002·Granted Oct 28, 2003·71 cites·31 claims
- 0794US7113566B1Enhancing resolution of X-ray measurements by sample motionJORDAN VALLEY APPLIED RADIATION LTD·Filed 2005·Granted Sep 26, 2006·31 cites·14 claims
- 0894US7076024B2X-ray apparatus with dual monochromatorsJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Jul 11, 2006·61 cites·36 claims
- 0994US6680996B2Dual-wavelength X-ray reflectometryJORDAN VALLEY APPLIED RADIATION LTD·Filed 2002·Granted Jan 20, 2004·55 cites·34 claims
- 1094US6381303B1X-ray microanalyzer for thin filmsJORDAN VALLEY APPLIED RADIATION LTD·Filed 1999·Granted Apr 30, 2002·178 cites·26 claims
- 1192US7481579B2Overlay metrology using X-raysJORDAN VALLEY APPLIED RADIATION LTD·Filed 2006·Granted Jan 27, 2009·23 cites·12 claims
- 1292US6453002B1Differential measurement of X-ray microfluorescenceJORDAN VALLEY APPLIED RADIATION LTD·Filed 2000·Granted Sep 17, 2002·44 cites·33 claims
- 1391US7130376B2X-ray reflectometry of thin film layers with enhanced accuracyJORDAN VALLEY APPLIED RADIATION LTD·Filed 2005·Granted Oct 31, 2006·17 cites·34 claims
- 1491US7103142B1Material analysis using multiple X-ray reflectometry modelsJORDAN VALLEY APPLIED RADIATION LTD·Filed 2005·Granted Sep 5, 2006·19 cites·30 claims
- 1591US6108398AX-ray microfluorescence analyzerJORDAN VALLEY APPLIED RADIATION LTD·Filed 1998·Granted Aug 22, 2000·108 cites·13 claims
- 1688US7245695B2Detection of dishing and tilting using X-ray fluorescenceJORDAN VALLEY APPLIED RADIATION LTD·Filed 2005·Granted Jul 17, 2007·14 cites·25 claims
- 1788US7068753B2Enhancement of X-ray reflectometry by measurement of diffuse reflectionsJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Jun 27, 2006·28 cites·21 claims
- 1886US7231016B2Efficient measurement of diffuse X-ray reflectionsJORDAN VALLEY APPLIED RADIATION LTD·Filed 2006·Granted Jun 12, 2007·9 cites·16 claims
- 1986US6947520B2Beam centering and angle calibration for X-ray reflectometryJORDAN VALLEY APPLIED RADIATION LTD·Filed 2002·Granted Sep 20, 2005·27 cites·42 claims
- 2086US6389102B2X-ray array detectorJORDAN VALLEY APPLIED RADIATION LTD·Filed 1999·Granted May 14, 2002·89 cites·29 claims
- 2184US7062013B2X-ray reflectometry of thin film layers with enhanced accuracyJORDAN VALLEY APPLIED RADIATION LTD·Filed 2003·Granted Jun 13, 2006·24 cites·14 claims
- 2284US7023954B2Optical alignment of X-ray microanalyzersJORDAN VALLEY APPLIED RADIATION LTD·Filed 2003·Granted Apr 4, 2006·25 cites·12 claims
- 2379US5946089APlasma spectrometer with shutter assemblyJORDAN VALLEY APPLIED RADIATION LTD·Filed 1998·Granted Aug 31, 1999·51 cites·25 claims
- 2478US7035375B2X-ray scattering with a polychromatic sourceJORDAN VALLEY APPLIED RADIATION LTD·Filed 2003·Granted Apr 25, 2006·14 cites·50 claims
- 2574US6041095AX-ray fluorescence analyzerJORDAN VALLEY APPLIED RADIATION LTD·Filed 1998·Granted Mar 21, 2000·39 cites·20 claims
- 2673US7474732B2Calibration of X-ray reflectometry systemJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Jan 6, 2009·12 cites·108 claims
- 2772US6535575B2Pulsed X-ray reflectometerJORDAN VALLEY APPLIED RADIATION LTD·Filed 2002·Granted Mar 18, 2003·9 cites·14 claims
- 2867US6907108B2Dual-wavelength x-ray monochromatorJORDAN VALLEY APPLIED RADIATION LTD·Filed 2004·Granted Jun 14, 2005·5 cites·4 claims
- 2967US6351516B1Detection of voids in semiconductor wafer processingJORDAN VALLEY APPLIED RADIATION LTD·Filed 1999·Granted Feb 26, 2002·35 cites·21 claims
- 3038US6184686B1Contamination and residuals inspection systemJORDAN VALLEY APPLIED RADIATION LTD·Filed 1998·Granted Feb 6, 2001·6 cites·8 claims
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