Assignee
JOSHI AMOL
US2 patents
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US8735302B2May 27, 2014
High productivity combinatorial oxide terracing and PVD/ALD metal deposition combined with lithography for gate work function extraction
JOSHI AMOL4 citations70
US8854067B2Oct 7, 2014
Circular transmission line methods compatible with combinatorial processing of semiconductors
JOSHI AMOL1 citations48