Assignee
KADLEC STANISLAV
CZ5 patents
Top patents by PatentIndex Score
US9355824B2May 31, 2016
Arc suppression and pulsing in high power impulse magnetron sputtering (HIPIMS)
KADLEC STANISLAV17 citations89
US8574409B2Nov 5, 2013
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
KADLEC STANISLAV18 citations89
US8435389B2May 7, 2013
RF substrate bias with high power impulse magnetron sputtering (HIPIMS)
KADLEC STANISLAV7 citations82
US9611537B2Apr 4, 2017
Target shaping
KADLEC STANISLAV2 citations70
US8246794B2Aug 21, 2012
Method of magnetron sputtering and a method for determining a power modulation compensation function for a power supply applied to a magnetron sputtering source
KADLEC STANISLAV1 citations49