Assignee
KAGA YUKINAO
JP·2 granted patents·1 pending application·7 citations·filing 2011–2012
Top patents by PatentIndex Score
3 records- 0178US8691708B2Method of manufacturing semiconductor device and substrate processing apparatusKAGA YUKINAO·Filed 2011·Granted Apr 8, 2014·4 cites·9 claims
- 0275US9045825B2Method of forming metal-containing filmKAGA YUKINAO·Filed 2012·Granted Jun 2, 2015·3 cites·6 claims
- 0336US2012108077A1Substrate processing apparatus and semiconductor device manufacturing methodKAGA YUKINAO·Filed 2011·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when KAGA YUKINAO files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →