Assignee
KAGEYAMA JUNICHI
JP·2 granted patents·529 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0197US8192901B2Glass substrate-holding toolKAGEYAMA JUNICHI·Filed 2010·Granted Jun 5, 2012·522 cites·24 claims
- 0291US8562794B2Process for producing reflective mask blank for EUV lithography and process for producing substrate with functional film for the mask blankKAGEYAMA JUNICHI·Filed 2010·Granted Oct 22, 2013·7 cites·19 claims
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