Assignee
KAHLON SATBIR
US·2 granted patents·1 pending application·2 citations·filing 2011–2011
Top patents by PatentIndex Score
3 records- 0159US9016289B2System and method for reducing particles and marks on wafer surface following reactor processingKAHLON SATBIR·Filed 2011·Granted Apr 28, 2015·2 cites·17 claims
- 0242US8647446B2Method and system for improving performance and preventing corrosion in multi-module cleaning chamberKAHLON SATBIR·Filed 2011·Granted Feb 11, 2014·0 cites·8 claims
- 0332US2013133701A1Method and apparatus for dispensing an inert gasKAHLON SATBIR·Filed 2011·Application pending·0 cites
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