Assignee
KAIM ROBERT
US5 patents
Top patents by PatentIndex Score
US8598022B2Dec 3, 2013
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT12 citations92
US8062965B2Nov 22, 2011
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT21 citations92
US8399865B2Mar 19, 2013
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT11 citations91
US8237134B2Aug 7, 2012
Method and apparatus for enhanced lifetime and performance of ion source in an ion implantation system
KAIM ROBERT23 citations91
US8138071B2Mar 20, 2012
Isotopically-enriched boron-containing compounds, and methods of making and using same
KAIM ROBERT3 citations62