Assignee
KAKEGAWA TAKASHI
JP·1 granted patent·1 pending application·31 citations·filing 2008–2012
Top patents by PatentIndex Score
2 records- 0187US8133323B2Film forming apparatus and method, gas supply device and storage mediumKAKEGAWA TAKASHI·Filed 2008·Granted Mar 13, 2012·31 cites·20 claims
- 0245US2012115400A1Surface treatment method, shower head, processing container, and processing apparatus using themKAKEGAWA TAKASHI·Filed 2012·Application pending·0 cites
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