Assignee

KALF WILLEM

NL·1 granted patent·3 citations·filing 2008–2008

Technology mixG01B1 G03F1 H10P1

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0159US8125615B2Optical focus sensor, an inspection apparatus and a lithographic apparatusKALF WILLEM·Filed 2008·Granted Feb 28, 2012·3 cites·11 claims

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