Assignee

KALISCH HOLGER

DE·1 granted patent·0 citations·filing 2008–2008

Technology mixB05D1 B82Y1 C23C1 H10K1 Y02E1

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1 record

0132US8304013B2Methods for depositing especially doped layers by means of OVPD or the likeKALISCH HOLGER·Filed 2008·Granted Nov 6, 2012·0 cites·15 claims

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