Assignee
KAMIDI RAMIDIN IZAIR
NL·2 granted patents·2 citations·filing 2009–2011
Top patents by PatentIndex Score
2 records- 0159US8279407B2Stage system and lithographic apparatus comprising such stage systemKAMIDI RAMIDIN IZAIR·Filed 2009·Granted Oct 2, 2012·1 cites·20 claims
- 0257US8854607B2Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing methodKAMIDI RAMIDIN IZAIR·Filed 2011·Granted Oct 7, 2014·1 cites·15 claims
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