Assignee
KAMIKAWA YUJI
JP·7 granted patents·1 pending application·48 citations·filing 2005–2011
Top patents by PatentIndex Score
8 records- 0195US8851819B2Substrate processing apparatusKAMIKAWA YUJI·Filed 2010·Granted Oct 7, 2014·29 cites·3 claims
- 0283US8944078B2Substrate processing apparatus, substrate processing method and storage mediumKAMIKAWA YUJI·Filed 2011·Granted Feb 3, 2015·6 cites·2 claims
- 0383US8268087B2Liquid processing apparatus, liquid processing method, and storage mediumKAMIKAWA YUJI·Filed 2008·Granted Sep 18, 2012·8 cites·13 claims
- 0465US8491726B2Liquid processing apparatus and process liquid supplying methodKAMIKAWA YUJI·Filed 2008·Granted Jul 23, 2013·2 cites·4 claims
- 0562US9004079B2Substrate processing apparatusKAMIKAWA YUJI·Filed 2011·Granted Apr 14, 2015·1 cites·6 claims
- 0661US8567417B2Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning methodKAMIKAWA YUJI·Filed 2010·Granted Oct 29, 2013·1 cites·6 claims
- 0761US8201567B2Liquid treating apparatusKAMIKAWA YUJI·Filed 2005·Granted Jun 19, 2012·1 cites·14 claims
- 0839US2012006356A1Substrate Processing Apparatus, Substrate Processing Method, and Computer-Readable Storage MediumKAMIKAWA YUJI·Filed 2011·Application pending·0 cites
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