Assignee
KAMIMURA SOU
JP3 patents
Top patents by PatentIndex Score
US8110333B2Feb 7, 2012
Resist composition containing novel sulfonium compound, pattern-forming method using the resist composition, and novel sulfonium compound
KAMIMURA SOU10 citations82
US8709704B2Apr 29, 2014
Pattern forming method using developer containing organic solvent and rinsing solution for use in the pattern forming method
KAMIMURA SOU4 citations71
US8092976B2Jan 10, 2012
Resist composition and pattern forming method using the same
KAMIMURA SOU0 citations40