Assignee
KAMO TAKASHI
JP4 patents
Top patents by PatentIndex Score
US9164371B2Oct 20, 2015
Method of correcting defects in a reflection-type mask and mask-defect correction apparatus
KAMO TAKASHI6 citations71
US8173332B2May 8, 2012
Reflection-type exposure mask and method of manufacturing a semiconductor device
KAMO TAKASHI5 citations60
US8603707B2Dec 10, 2013
Exposure method and exposure mask
KAMO TAKASHI0 citations51
US8535854B2Sep 17, 2013
Reflective exposure mask, method of fabricating reflective exposure mask, method of inspecting reflective exposure mask, and method of cleaning reflective exposure mask
KAMO TAKASHI1 citations51