Assignee
KANDEL DANIEL
IL5 patents
Top patents by PatentIndex Score
US8441639B2May 14, 2013
Metrology systems and methods
KANDEL DANIEL35 citations93
US8908175B1Dec 9, 2014
Flexible scatterometry metrology system and method
KANDEL DANIEL26 citations92
US9927718B2Mar 27, 2018
Multi-layer overlay metrology target and complimentary overlay metrology measurement systems
KANDEL DANIEL9 citations84
US8848186B2Sep 30, 2014
Angle-resolved antisymmetric scatterometry
KANDEL DANIEL8 citations84
US11372340B2Jun 28, 2022
Method and system for providing a quality metric for improved process control
KANDEL DANIEL4 citations67