Assignee
KANNAN HIROSHI
JP·2 granted patents·1 citations·filing 2003–2010
Top patents by PatentIndex Score
2 records- 0142US8574448B2Plasma generation method, cleaning method, and substrate processing methodKANNAN HIROSHI·Filed 2010·Granted Nov 5, 2013·0 cites·20 claims
- 0242US8075698B2Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processingKANNAN HIROSHI·Filed 2003·Granted Dec 13, 2011·1 cites·19 claims
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