Assignee
KAO CHIEN-TEH
US·4 granted patents·2 pending applications·201 citations·filing 2008–2013
Top patents by PatentIndex Score
6 records- 0197US8846163B2Method for removing oxidesKAO CHIEN-TEH·Filed 2012·Granted Sep 30, 2014·190 cites·19 claims
- 0289US10593539B2Support assemblyKAO CHIEN TEH·Filed 2012·Granted Mar 17, 2020·5 cites·20 claims
- 0388US9004006B2Process chamber lid design with built-in plasma source for short lifetime speciesKAO CHIEN-TEH·Filed 2011·Granted Apr 14, 2015·5 cites·18 claims
- 0463US8318605B2Plasma treatment method for preventing defects in doped silicon oxide surfaces during exposure to atmosphereKAO CHIEN-TEH·Filed 2008·Granted Nov 27, 2012·1 cites·20 claims
- 0556US2011223755A1Method for removing oxidesKAO CHIEN-TEH·Filed 2011·Application pending·0 cites
- 0655US2014174362A1Apparatus And Methods For Symmetrical Gas Distribution With High Purge EfficiencyKAO CHIEN-TEH·Filed 2013·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →