Assignee
KASAI SHIGERU
JP11 patents
Top patents by PatentIndex Score
US8246900B2Aug 21, 2012
Annealing apparatus
KASAI SHIGERU468 citations97
US8907259B2Dec 9, 2014
Microwave irradiation device and microwave irradiation method
KASAI SHIGERU43 citations93
US8794073B2Aug 5, 2014
Structure for attaching vibration sensor to storage device
KASAI SHIGERU12 citations84
US8308898B2Nov 13, 2012
Tuner and microwave plasma source
KASAI SHIGERU19 citations84
US8897631B2Nov 25, 2014
Annealing apparatus
KASAI SHIGERU8 citations83
US8128751B2Mar 6, 2012
Film-forming apparatus
KASAI SHIGERU11 citations82
US9202731B2Dec 1, 2015
Liquid processing apparatus, liquid processing method, and recording medium having program for executing liquid processing method recorded therein
KASAI SHIGERU2 citations60
US9224623B2Dec 29, 2015
Microwave irradiation apparatus
KASAI SHIGERU2 citations59
US8891188B2Nov 18, 2014
Breakdown prediction device, breakdown prediction method, and breakdown prediction program
KASAI SHIGERU1 citations52
US8440939B2May 14, 2013
Annealing device
KASAI SHIGERU0 citations52
US8163128B2Apr 24, 2012
Plasma processing apparatus
KASAI SHIGERU1 citations52