Assignee
KASPER INSTRUMENTS
11 patents
Top patents by PatentIndex Score
US4228902AOct 21, 1980
Carrier for semiconductive wafers
KASPER INSTRUMENTS85 citations93
US4241389ADec 23, 1980
Multiple apparent source optical imaging system
KASPER INSTRUMENTS34 citations91
US4070117AJan 24, 1978
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS46 citations91
US3955072AMay 4, 1976
Apparatus for the automatic alignment of two superimposed objects for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS45 citations91
US4153164AMay 8, 1979
Carrier for semiconductive wafers
KASPER INSTRUMENTS72 citations89
US4040736AAug 9, 1977
Step-and-repeat projection alignment and exposure system
KASPER INSTRUMENTS27 citations81
US4236851ADec 2, 1980
Disc handling system and method
KASPER INSTRUMENTS21 citations74
US3940211AFeb 24, 1976
Step-and-repeat projection alignment and exposure system
KASPER INSTRUMENTS16 citations73
US4408885AOct 11, 1983
Apparatus for the automatic alignment of two superimposed objects, e.g. a semiconductor wafer and mask
KASPER INSTRUMENTS12 citations72
US4259019AMar 31, 1981
Apparatus for the automatic alignment of two superimposed objects, for example a semiconductor wafer and a transparent mask
KASPER INSTRUMENTS10 citations72
US4181214AJan 1, 1980
Wafer transfer apparatus
KASPER INSTRUMENTS12 citations68