Assignee
KATO TADAHIRO
JP·3 granted patents·5 citations·filing 2007–2010
Top patents by PatentIndex Score
3 records- 0169US8231430B2Wafer production methodKATO TADAHIRO·Filed 2007·Granted Jul 31, 2012·3 cites·6 claims
- 0265US8454852B2Chamfering apparatus for silicon wafer, method for producing silicon wafer, and etched silicon waferKATO TADAHIRO·Filed 2008·Granted Jun 4, 2013·2 cites·4 claims
- 0341US8603897B2Method for manufacturing bonded waferKATO TADAHIRO·Filed 2010·Granted Dec 10, 2013·0 cites·8 claims
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