Assignee
KAUSHAL SANJEEV
US·7 granted patents·1 pending application·151 citations·filing 2008–2014
Top patents by PatentIndex Score
8 records- 0197US8396582B2Method and apparatus for self-learning and self-improving a semiconductor manufacturing toolKAUSHAL SANJEEV·Filed 2010·Granted Mar 12, 2013·61 cites·21 claims
- 0286US8954184B2Tool performance by linking spectroscopic information with tool operational parameters and material measurement informationKAUSHAL SANJEEV·Filed 2011·Granted Feb 10, 2015·8 cites·19 claims
- 0386US8725667B2Method and system for detection of tool performance degradation and mismatchKAUSHAL SANJEEV·Filed 2009·Granted May 13, 2014·30 cites·50 claims
- 0486US8078552B2Autonomous adaptive system and method for improving semiconductor manufacturing qualityKAUSHAL SANJEEV·Filed 2008·Granted Dec 13, 2011·16 cites·30 claims
- 0582US8723869B2Biologically based chamber matchingKAUSHAL SANJEEV·Filed 2011·Granted May 13, 2014·8 cites·32 claims
- 0681US9275335B2Autonomous biologically based learning toolKAUSHAL SANJEEV·Filed 2012·Granted Mar 1, 2016·11 cites·20 claims
- 0781US8190543B2Autonomous biologically based learning toolKAUSHAL SANJEEV·Filed 2008·Granted May 29, 2012·17 cites·13 claims
- 0847US2015332167A1System and method for modeling and/or analyzing manufacturing processesKAUSHAL SANJEEV·Filed 2014·Application pending·0 cites
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