Assignee
KAUTZSCH THORALF
DE16 patents
Top patents by PatentIndex Score
US8481400B2Jul 9, 2013
Semiconductor manufacturing and semiconductor device with semiconductor structure
KAUTZSCH THORALF9 citations83
US8471346B2Jun 25, 2013
Semiconductor device including a cavity
KAUTZSCH THORALF7 citations81
US10017015B2Jul 10, 2018
Method for detecting wheel rotation using a one-dimensional acceleration sensor
KAUTZSCH THORALF4 citations73
US9550669B2Jan 24, 2017
Vertical pressure sensitive structure
KAUTZSCH THORALF2 citations73
US8611705B2Dec 17, 2013
Silicon optical switch devices
KAUTZSCH THORALF2 citations63
US8518732B2Aug 27, 2013
Method of providing a semiconductor structure with forming a sacrificial structure
KAUTZSCH THORALF3 citations61
US8994127B2Mar 31, 2015
Method of fabricating isolating semiconductor structures using a layout of trenches and openings
KAUTZSCH THORALF3 citations60
US8266962B2Sep 18, 2012
Acceleration sensor
KAUTZSCH THORALF4 citations60
US9551837B2Jan 24, 2017
Silicon optical line multiplexer devices
KAUTZSCH THORALF0 citations52
US9190540B2Nov 17, 2015
Photo cell devices for phase-sensitive detection of light signals
KAUTZSCH THORALF0 citations52
US8975715B2Mar 10, 2015
Photodetector and method for manufacturing the same
KAUTZSCH THORALF1 citations52
US8916873B2Dec 23, 2014
Photodetector with controllable spectral response
KAUTZSCH THORALF0 citations52
US8853813B2Oct 7, 2014
Photo cell devices and methods for spectrometric applications
KAUTZSCH THORALF0 citations52
US8278727B2Oct 2, 2012
Pressure sensor and method
KAUTZSCH THORALF1 citations51
US8627720B2Jan 14, 2014
Acceleration sensor
KAUTZSCH THORALF0 citations49
US10205032B2Feb 12, 2019
Semiconductor structure and method for making same
KAUTZSCH THORALF0 citations42