Assignee
KAWABE YOSHIO
JP·2 granted patents·3 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0172US8497977B2Optical integrator, illumination optical system, exposure apparatus, and device manufacturing methodKAWABE YOSHIO·Filed 2010·Granted Jul 30, 2013·3 cites·27 claims
- 0240US9075322B2Reflective imaging optical system, exposure apparatus, and method for producing deviceKAWABE YOSHIO·Filed 2011·Granted Jul 7, 2015·0 cites·49 claims
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