Assignee
KAWADA HIROKI
JP·2 granted patents·8 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0175US9702695B2Image processing device, charged particle beam device, charged particle beam device adjustment sample, and manufacturing method thereofKAWADA HIROKI·Filed 2011·Granted Jul 11, 2017·5 cites·7 claims
- 0273US9297649B2Pattern dimension measurement method and charged particle beam apparatusKAWADA HIROKI·Filed 2011·Granted Mar 29, 2016·3 cites·7 claims
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