Assignee
KAWAHARA ATSUSHI
JP·2 granted patents·0 citations·filing 2010–2010
Top patents by PatentIndex Score
2 records- 0145US8059269B2Particle inspection apparatus, exposure apparatus, and device manufacturing methodKAWAHARA ATSUSHI·Filed 2010·Granted Nov 15, 2011·0 cites·4 claims
- 0240US8330949B2Foreign substance inspection apparatus, exposure apparatus, and method of manufacturing deviceKAWAHARA ATSUSHI·Filed 2010·Granted Dec 11, 2012·0 cites·7 claims
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