Assignee
KAWAMURA SHIGERU
JP·2 granted patents·3 citations·filing 2007–2012
Top patents by PatentIndex Score
2 records- 0164US8647440B2Substrate processing method and substrate processing apparatusKAWAMURA SHIGERU·Filed 2007·Granted Feb 11, 2014·3 cites·5 claims
- 0245US8945412B2Substrate cleaning apparatus, substrate cleaning method, and substrate processing apparatusKAWAMURA SHIGERU·Filed 2012·Granted Feb 3, 2015·0 cites·4 claims
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