Assignee
KAWASAKI TOMONORI
2 granted patents·12 citations·filing 1976–2010
Top patents by PatentIndex Score
2 records- 0174US8664092B2Method for cleaning silicon wafer, and method for producing epitaxial wafer using the cleaning methodKAWASAKI TOMONORI·Filed 2010·Granted Mar 4, 2014·4 cites·4 claims
- 0247US4106087APower-supply device for working machine such as a spark-erosion machineKAWASAKI TOMONORI·Filed 1976·Granted Aug 8, 1978·8 cites·5 claims
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