Assignee
KAWASHIMA HARUNA
JP·2 granted patents·1 pending application·13 citations·filing 2005–2009
Top patents by PatentIndex Score
3 records- 0188US8077288B2Exposure apparatusKAWASHIMA HARUNA·Filed 2006·Granted Dec 13, 2011·13 cites·4 claims
- 0247US8164754B2Immersion exposure apparatus and device manufacturing methodKAWASHIMA HARUNA·Filed 2009·Granted Apr 24, 2012·0 cites·9 claims
- 0338US2005237502A1Exposure apparatusKAWASHIMA HARUNA·Filed 2005·Application pending·0 cites
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