Assignee
KAWAUE AKIYA
JP·7 granted patents·25 citations·filing 2008–2012
Top patents by PatentIndex Score
7 records- 0190US9023581B2Resist composition, method of forming resist pattern, polymeric compound, and compoundKAWAUE AKIYA·Filed 2011·Granted May 5, 2015·8 cites·14 claims
- 0289US8338076B2Resist composition, method of forming resist pattern, novel compound, and acid generatorKAWAUE AKIYA·Filed 2009·Granted Dec 25, 2012·7 cites·24 claims
- 0376US8703387B2Resist composition, method of forming resist pattern, novel compound, and acid generatorKAWAUE AKIYA·Filed 2012·Granted Apr 22, 2014·2 cites·7 claims
- 0476US8252505B2Compound and method of producing same, acid generator, resist composition, and method of forming resist patternKAWAUE AKIYA·Filed 2009·Granted Aug 28, 2012·4 cites·12 claims
- 0569US8206890B2Resist composition, method of forming resist pattern, compound and acid generatorKAWAUE AKIYA·Filed 2009·Granted Jun 26, 2012·2 cites·10 claims
- 0668US8227169B2Compound, acid generator, resist composition, and method of forming resist patternKAWAUE AKIYA·Filed 2008·Granted Jul 24, 2012·2 cites·9 claims
- 0754US8541157B2Resist composition, method of forming resist pattern, compound and acid generator including the sameKAWAUE AKIYA·Filed 2009·Granted Sep 24, 2013·0 cites·12 claims
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