Assignee
KEIGLER ARTHUR
US·9 granted patents·2 pending applications·18 citations·filing 2010–2012
Top patents by PatentIndex Score
11 records- 0187US8425687B2Wetting a workpiece surface in a fluid-processing systemKEIGLER ARTHUR·Filed 2010·Granted Apr 23, 2013·8 cites·20 claims
- 0283US9257319B2Parallel single substrate processing system with alignment features on a process section frameKEIGLER ARTHUR·Filed 2012·Granted Feb 9, 2016·4 cites·20 claims
- 0375US8168057B2Balancing pressure to improve a fluid sealKEIGLER ARTHUR·Filed 2010·Granted May 1, 2012·3 cites·12 claims
- 0474US9508582B2Parallel single substrate marangoni moduleKEIGLER ARTHUR·Filed 2012·Granted Nov 29, 2016·2 cites·19 claims
- 0569US8277624B2Method and apparatus for fluid processing a workpieceKEIGLER ARTHUR·Filed 2011·Granted Oct 2, 2012·1 cites·10 claims
- 0654US9449862B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Sep 20, 2016·0 cites·20 claims
- 0753US9293356B2Parallel single substrate processing systemKEIGLER ARTHUR·Filed 2012·Granted Mar 22, 2016·0 cites·20 claims
- 0851US8512543B2Method for fluid processing a workpieceKEIGLER ARTHUR·Filed 2010·Granted Aug 20, 2013·0 cites·20 claims
- 0940US2012305404A1Method and apparatus for fluid processing a workpieceKEIGLER ARTHUR·Filed 2012·Application pending·0 cites
- 1036US9714474B2Seed layer deposition in microscale featuresKEIGLER ARTHUR·Filed 2010·Granted Jul 25, 2017·0 cites·5 claims
- 1130US2012325671A2Electroplated lead-free bump depositionKEIGLER ARTHUR·Filed 2010·Application pending·0 cites
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