Assignee
KEIL DOUGLAS
US3 patents
Top patents by PatentIndex Score
US10224182B2Mar 5, 2019
Mechanical suppression of parasitic plasma in substrate processing chamber
KEIL DOUGLAS17 citations93
US9111724B2Aug 18, 2015
Apparatus and method for controlling plasma potential
KEIL DOUGLAS5 citations72
US8849585B2Sep 30, 2014
Methods for automatically characterizing a plasma
KEIL DOUGLAS1 citations45