Assignee
KEMPEN ANTONIUS THEODORUS WILHELMUS
NL·4 granted patents·3 citations·filing 2009–2012
Top patents by PatentIndex Score
4 records- 0165US9164403B2Radiation source, lithographic apparatus and device manufacturing methodKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2010·Granted Oct 20, 2015·1 cites·16 claims
- 0261US8685632B2Radiation source, lithographic apparatus and device manufacturing methodKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2009·Granted Apr 1, 2014·1 cites·5 claims
- 0355US9119280B2Radiation sourceKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2011·Granted Aug 25, 2015·1 cites·15 claims
- 0435US9192039B2Radiation sourceKEMPEN ANTONIUS THEODORUS WILHELMUS·Filed 2012·Granted Nov 17, 2015·0 cites·12 claims
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