Assignee
KHUAT DUY LAURENT
NL·2 granted patents·21 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0190US8610898B2Self-referencing interferometer, alignment system, and lithographic apparatusKHUAT DUY LAURENT·Filed 2011·Granted Dec 17, 2013·18 cites·19 claims
- 0277US8570487B2Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrateKHUAT DUY LAURENT·Filed 2011·Granted Oct 29, 2013·3 cites·16 claims
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