Assignee
KIDA YOSHIKI
JP·2 granted patents·4 citations·filing 2006–2011
Top patents by PatentIndex Score
2 records- 0174US9239524B2Exposure condition determination method, exposure method, exposure apparatus, and device manufacturing method involving detection of the situation of a liquid immersion regionKIDA YOSHIKI·Filed 2006·Granted Jan 19, 2016·4 cites·48 claims
- 0251US8913224B2Exposure apparatus, exposure method, and device producing methodKIDA YOSHIKI·Filed 2011·Granted Dec 16, 2014·0 cites·23 claims
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