Assignee

KIM CHOON-GOANG

KR·1 granted patent·8 citations·filing 2012–2012

Technology mixB24B1 H10P1 Y10T1

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1 record

0172US8858302B2Retainer rings of chemical mechanical polishing apparatus and methods of manufacturing the sameKIM CHOON-GOANG·Filed 2012·Granted Oct 14, 2014·8 cites·18 claims

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