Assignee
KIM KEECHAN
US·3 granted patents·1 pending application·3 citations·filing 2008–2025
Top patents by PatentIndex Score
4 records- 0179US2025364225A1Lower plasma exclusion zone rings for bevel etcherKIM KEECHAN·Filed 2025·Application pending·0 cites
- 0266US8257503B2Method and apparatus for detecting plasma unconfinementKIM KEECHAN·Filed 2008·Granted Sep 4, 2012·2 cites·18 claims
- 0363US8852384B2Method and apparatus for detecting plasma unconfinementKIM KEECHAN·Filed 2012·Granted Oct 7, 2014·1 cites·19 claims
- 0447US9184030B2Edge exclusion control with adjustable plasma exclusion zone ringKIM KEECHAN·Filed 2012·Granted Nov 10, 2015·0 cites·15 claims
Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →