Assignee
KIM KYOUNG-MI
KR·3 granted patents·3 pending applications·14 citations·filing 2005–2011
Top patents by PatentIndex Score
6 records- 0184US8071484B2Method of forming fine pattern employing self-aligned double patterningKIM KYOUNG-MI·Filed 2008·Granted Dec 6, 2011·11 cites·20 claims
- 0274US9218969B2Method for reducing intermixing between films of a patterning process, patterning process, and device manufactured by the patterning processKIM KYOUNG MI·Filed 2011·Granted Dec 22, 2015·3 cites·19 claims
- 0344US8450444B2Siloxane polymer compositionKIM KYOUNG-MI·Filed 2010·Granted May 28, 2013·0 cites·5 claims
- 0438US2005266343A1Photoresist composition and method of forming sameKIM KYOUNG-MI·Filed 2005·Application pending·0 cites
- 0537US2011129781A1Methods of forming a pattern using photoresist compositionsKIM KYOUNG-MI·Filed 2010·Application pending·0 cites
- 0635US2011300712A1Methods of Forming a Photoresist Pattern Using Plasma Treatment of Photoresist PatternsKIM KYOUNG-MI·Filed 2011·Application pending·0 cites
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