Assignee
KINSHO TAKESHI
JP·4 granted patents·14 citations·filing 2010–2011
Top patents by PatentIndex Score
4 records- 0194US8846846B2Naphthalene derivative, resist bottom layer material, and patterning processKINSHO TAKESHI·Filed 2011·Granted Sep 30, 2014·8 cites·2 claims
- 0284US8697903B2Fluorinated ester monomer, making method, fluorinated ester polymer, and difluorohydroxycarboxylic acidKINSHO TAKESHI·Filed 2011·Granted Apr 15, 2014·3 cites·1 claims
- 0383US8795955B2Naphthalene derivative, resist bottom layer material, resist bottom layer forming method, and patterning processKINSHO TAKESHI·Filed 2011·Granted Aug 5, 2014·3 cites·14 claims
- 0445US8791288B2Acid-labile ester monomer having spirocyclic structure, polymer, resist composition, and patterning processKINSHO TAKESHI·Filed 2010·Granted Jul 29, 2014·0 cites·11 claims
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