Assignee
KIONIX INC
US43 patents
Top patents by PatentIndex Score
US6454938B2Sep 24, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC95 citations99
US6245227B1Jun 12, 2001
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC124 citations99
US6239473B1May 29, 2001
Trench isolation for micromechanical devices
KIONIX INC137 citations99
US6149190ANov 21, 2000
Micromechanical accelerometer for automotive applications
KIONIX INC178 citations99
US6066265AMay 23, 2000
Micromachined silicon probe for scanning probe microscopy
KIONIX INC109 citations98
US6394942B2May 28, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC77 citations97
US6464866B2Oct 15, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC31 citations96
US6432311B2Aug 13, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC34 citations96
US6417510B2Jul 9, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC46 citations96
US6342430B1Jan 29, 2002
Trench isolation for micromechanical devices
KIONIX INC57 citations96
US6797589B2Sep 28, 2004
Insulating micro-structure and method of manufacturing same
KIONIX INC46 citations93
US7171975B2Feb 6, 2007
Fabrication of ultra-shallow channels for microfluidic devices and systems
KIONIX INC42 citations92
US6461516B2Oct 8, 2002
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC20 citations92
US7011793B2Mar 14, 2006
Reconfigurable modular microfluidic system and method of fabrication
KIONIX INC20 citations91
US7036372B2May 2, 2006
Z-axis angular rate sensor
KIONIX INC92 citations90
US6792804B2Sep 21, 2004
Sensor for measuring out-of-plane acceleration
KIONIX INC44 citations89
US7430909B2Oct 7, 2008
Tri-axis accelerometer
KIONIX INC33 citations88
US6800202B2Oct 5, 2004
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC10 citations82
US7026899B2Apr 11, 2006
Push/pull actuator for microstructures
KIONIX INC9 citations74
US6913701B2Jul 5, 2005
Method for fabricating integrated LC/ESI device using SMILE, latent masking, and delayed LOCOS techniques
KIONIX INC6 citations73
US6706200B2Mar 16, 2004
Method for fabricating ESI device using smile and delayed LOCOS techniques
KIONIX INC8 citations73
US6673253B2Jan 6, 2004
Method of fabricating integrated LC/ESI device using smile, latent masking, and delayed locos techniques.
KIONIX INC7 citations73
US10053360B1Aug 21, 2018
Pseudo SOI process
KIONIX INC4 citations72
US10793427B2Oct 6, 2020
Eutectic bonding with AlGe
KIONIX INC2 citations71
US10766767B2Sep 8, 2020
Eutectic bonding with ALGe
KIONIX INC2 citations71
US9541462B2Jan 10, 2017
Pressure sensor including deformable pressure vessel(s)
KIONIX INC3 citations69
US10167191B2Jan 1, 2019
Method for manufacturing a micro electro-mechanical system
KIONIX INC5 citations66
US10030976B2Jul 24, 2018
Phase-based measurement and control of a gyroscope
KIONIX INC2 citations64
US7451057B2Nov 11, 2008
System and method for detection of freefall with spin using two tri-axis accelerometers
KIONIX INC4 citations63
US6800198B2Oct 5, 2004
Integrated monolithic microfabricated electrospray and liquid chromatography system and method
KIONIX INC1 citations63
US11527376B2Dec 13, 2022
Micro-electromechanical system devices and methods
KIONIX INC0 citations58
US11313877B2Apr 26, 2022
Near-zero power wakeup electro-mechanical system
KIONIX INC0 citations55
US11634317B2Apr 25, 2023
Composite spring for robust piezoelectric sensing
KIONIX INC0 citations54
US9465044B2Oct 11, 2016
Angular velocity estimation using a magnetometer and accelerometer
KIONIX INC1 citations52
US9347846B2May 24, 2016
Capacitance-based pressure sensor including pressure vessel(s)
KIONIX INC1 citations52
US6969470B2Nov 29, 2005
Method for fabricating ESI device using smile and delayed LOCOS techniques
KIONIX INC0 citations52
US6824697B2Nov 30, 2004
Method for fabricating mems and microfluidic devices using smile, latent masking, and delayed locos techniques
KIONIX INC0 citations52
US10843921B2Nov 24, 2020
Electrical connection to a micro electro-mechanical system
KIONIX INC0 citations50
US10829366B2Nov 10, 2020
Electronic systems with through-substrate interconnects and MEMS device
KIONIX INC0 citations50
US10315915B2Jun 11, 2019
Electronic systems with through-substrate interconnects and MEMS device
KIONIX INC0 citations50
US10393605B2Aug 27, 2019
Pressure sensor including deformable pressure vessel(s)
KIONIX INC0 citations48
US11885647B2Jan 30, 2024
Accelerometer apparatuses and systems for noise rejection
KIONIX INC0 citations43
US9751757B2Sep 5, 2017
Single motor dynamic calibration unit
KIONIX INC0 citations32