Assignee
KITA NAONORI
JP·4 granted patents·5 citations·filing 2008–2011
Top patents by PatentIndex Score
4 records- 0169US9389519B2Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2011·Granted Jul 12, 2016·2 cites·22 claims
- 0259US8587764B2Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2008·Granted Nov 19, 2013·3 cites·20 claims
- 0341US8638420B2Optical integrator, illuminating optical device, exposure apparatus and device manufacturing methodKITA NAONORI·Filed 2008·Granted Jan 28, 2014·0 cites·19 claims
- 0440US9122170B2Transmission optical system, illumination optical system, exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2011·Granted Sep 1, 2015·0 cites·12 claims
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