Assignee
KIYAMA HIROKI
JP·3 granted patents·33 citations·filing 2009–2012
Top patents by PatentIndex Score
3 records- 0191US8852966B2Heat treatment method and heat treatment apparatus of thin filmKIYAMA HIROKI·Filed 2012·Granted Oct 7, 2014·15 cites·1 claims
- 0288US8145046B2Heat treatment apparatus and method for heating substrate by light irradiationKIYAMA HIROKI·Filed 2009·Granted Mar 27, 2012·14 cites·4 claims
- 0380US8498525B2Heat treatment apparatus and method for heating substrate by light irradiationKIYAMA HIROKI·Filed 2011·Granted Jul 30, 2013·4 cites·5 claims
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