Assignee
KLA CORP
US·491 granted patents·281 pending applications·500 citations·filing 2015–2025
Top patents by PatentIndex Score
772 records- 0198US11782411B2System and method for mitigating overlay distortion patterns caused by a wafer bonding toolKLA CORP·Filed 2022·Granted Oct 10, 2023·5 cites·15 claims
- 0298US11604149B2Metrology methods and optical schemes for measurement of misregistration by using hatched target designsKLA CORP·Filed 2021·Granted Mar 14, 2023·9 cites·57 claims
- 0398US11526086B2Multi-field scanning overlay metrologyKLA CORP·Filed 2021·Granted Dec 13, 2022·10 cites·36 claims
- 0498US11520321B2Measurement recipe optimization based on probabilistic domain knowledge and physical realizationKLA CORP·Filed 2020·Granted Dec 6, 2022·9 cites·20 claims
- 0598US11428642B2Scanning scatterometry overlay measurementKLA CORP·Filed 2021·Granted Aug 30, 2022·12 cites·29 claims
- 0698US11300405B2Grey-mode scanning scatterometry overlay metrologyKLA CORP·Filed 2021·Granted Apr 12, 2022·7 cites·24 claims
- 0798US11164307B1Misregistration metrology by using fringe Moiré and optical Moiré effectsKLA CORP·Filed 2020·Granted Nov 2, 2021·18 cites·35 claims
- 0898US10921261B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2020·Granted Feb 16, 2021·11 cites·17 claims
- 0997US11355375B2Device-like overlay metrology targets displaying Moiré effectsKLA CORP·Filed 2020·Granted Jun 7, 2022·6 cites·21 claims
- 1097US11346657B2Measurement modes for overlayKLA CORP·Filed 2020·Granted May 31, 2022·7 cites·35 claims
- 1197US11309202B2Overlay metrology on bonded wafersKLA CORP·Filed 2020·Granted Apr 19, 2022·5 cites·39 claims
- 1297US11237455B2Frequency conversion using stacked strontium tetraborate platesKLA CORP·Filed 2021·Granted Feb 1, 2022·6 cites·23 claims
- 1397US11145559B2Process monitoring of deep structures with X-ray scatterometryKLA CORP·Filed 2020·Granted Oct 12, 2021·4 cites·12 claims
- 1496US11796925B2Scanning overlay metrology using overlay targets having multiple spatial frequenciesKLA CORP·Filed 2022·Granted Oct 24, 2023·6 cites·22 claims
- 1596US11573497B2System and method for measuring misregistration of semiconductor device wafers utilizing induced topographyKLA CORP·Filed 2020·Granted Feb 7, 2023·5 cites·20 claims
- 1696US11531275B1Parallel scatterometry overlay metrologyKLA CORP·Filed 2021·Granted Dec 20, 2022·9 cites·31 claims
- 1796US11360032B2Strontium tetraborate as optical coating materialKLA CORP·Filed 2021·Granted Jun 14, 2022·4 cites·7 claims
- 1896US11300524B1Pupil-plane beam scanning for metrologyKLA CORP·Filed 2021·Granted Apr 12, 2022·12 cites·27 claims
- 1996US11114491B2Back-illuminated sensor and a method of manufacturing a sensorKLA CORP·Filed 2019·Granted Sep 7, 2021·8 cites·16 claims
- 2096US11073768B2Metrology target for scanning metrologyKLA CORP·Filed 2019·Granted Jul 27, 2021·19 cites·21 claims
- 2195US12105433B2Imaging overlay targets using moiré elements and rotational symmetry arrangementsKLA CORP·Filed 2022·Granted Oct 1, 2024·2 cites·6 claims
- 2295US11573077B2Scatterometry based methods and systems for measurement of strain in semiconductor structuresKLA CORP·Filed 2021·Granted Feb 7, 2023·4 cites·7 claims
- 2395US11567391B1Frequency conversion using interdigitated nonlinear crystal gratingsKLA CORP·Filed 2021·Granted Jan 31, 2023·5 cites·21 claims
- 2495US11519719B2Transmission small-angle X-ray scattering metrology systemKLA CORP·Filed 2020·Granted Dec 6, 2022·3 cites·20 claims
- 2595US11356594B1Tilted slit confocal system configured for automated focus detection and trackingKLA CORP·Filed 2020·Granted Jun 7, 2022·9 cites·35 claims
- 2695US10942135B2Radial polarizer for particle detectionKLA CORP·Filed 2019·Granted Mar 9, 2021·9 cites·27 claims
- 2794US12164277B2System and method for mitigating overlay distortion patterns caused by a wafer bonding toolKLA CORP·Filed 2023·Granted Dec 10, 2024·1 cites·18 claims
- 2894US12032300B2Imaging overlay with mutually coherent oblique illuminationKLA CORP·Filed 2022·Granted Jul 9, 2024·2 cites·23 claims
- 2994US11841621B2Moiré scatterometry overlayKLA CORP·Filed 2021·Granted Dec 12, 2023·2 cites·39 claims
- 3094US11726126B2Apparatus, method and computer program product for defect detection in work piecesKLA CORP·Filed 2021·Granted Aug 15, 2023·2 cites·18 claims
- 3194US11551348B2Learnable defect detection for semiconductor applicationsKLA CORP·Filed 2020·Granted Jan 10, 2023·5 cites·38 claims
- 3294US11450521B2Laser sustained plasma light source with high pressure flowKLA CORP·Filed 2021·Granted Sep 20, 2022·5 cites·46 claims
- 3394US11415526B2Multi-controller inspection systemKLA CORP·Filed 2020·Granted Aug 16, 2022·4 cites·29 claims
- 3494US11209737B1Performance optimized scanning sequence for eBeam metrology and inspectionKLA CORP·Filed 2020·Granted Dec 28, 2021·5 cites·24 claims
- 3594US11143604B1Soft x-ray optics with improved filteringKLA CORP·Filed 2020·Granted Oct 12, 2021·4 cites·9 claims
- 3694US11056312B1Micro stigmator array for multi electron beam systemKLA CORP·Filed 2020·Granted Jul 6, 2021·6 cites·30 claims
- 3793US11906770B2Monolithic optical retarderKLA CORP·Filed 2021·Granted Feb 20, 2024·2 cites·38 claims
- 3893US11899375B2Massive overlay metrology sampling with multiple measurement columnsKLA CORP·Filed 2021·Granted Feb 13, 2024·2 cites·56 claims
- 3993US11829077B2System and method for determining post bonding overlayKLA CORP·Filed 2021·Granted Nov 28, 2023·3 cites·19 claims
- 4093US11800212B1Multi-directional overlay metrology using multiple illumination parameters and isolated imagingKLA CORP·Filed 2022·Granted Oct 24, 2023·5 cites·31 claims
- 4193US11614480B2System and method for Z-PAT defect-guided statistical outlier detection of semiconductor reliability failuresKLA CORP·Filed 2021·Granted Mar 28, 2023·3 cites·29 claims
- 4293US11604420B2Self-calibrating overlay metrologyKLA CORP·Filed 2021·Granted Mar 14, 2023·2 cites·44 claims
- 4393US11543732B2Frequency conversion using stacked strontium tetraborate platesKLA CORP·Filed 2021·Granted Jan 3, 2023·2 cites·23 claims
- 4493US11378394B1On-the-fly scatterometry overlay metrology targetKLA CORP·Filed 2020·Granted Jul 5, 2022·7 cites·24 claims
- 4593US11221300B2Determining metrology-like information for a specimen using an inspection toolKLA CORP·Filed 2021·Granted Jan 11, 2022·2 cites·25 claims
- 4693US10990019B2Stochastic reticle defect dispositioningKLA CORP·Filed 2020·Granted Apr 27, 2021·4 cites·28 claims
- 4793US10948423B2Sensitive particle detection with spatially-varying polarization rotator and polarizerKLA CORP·Filed 2019·Granted Mar 16, 2021·7 cites·31 claims
- 4892US12253805B2Scatterometry overlay metrology with orthogonal fine-pitch segmentationKLA CORP·Filed 2022·Granted Mar 18, 2025·2 cites·45 claims
- 4992US12253846B2Bandwidth adjustment for remote control of a manufacturing toolKLA CORP·Filed 2023·Granted Mar 18, 2025·2 cites·11 claims
- 5092US12001148B2Enhancing performance of overlay metrologyKLA CORP·Filed 2023·Granted Jun 4, 2024·2 cites·26 claims
Showing the top 50 of 772 patent records by PatentIndex Score.
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