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KLA CORP
US491 patents
Top patents by PatentIndex Score
US11073768B2Jul 27, 2021
Metrology target for scanning metrology
KLA CORP19 citations94
US11604149B2Mar 14, 2023
Metrology methods and optical schemes for measurement of misregistration by using hatched target designs
KLA CORP9 citations86
US11526086B2Dec 13, 2022
Multi-field scanning overlay metrology
KLA CORP10 citations86
US11520321B2Dec 6, 2022
Measurement recipe optimization based on probabilistic domain knowledge and physical realization
KLA CORP9 citations86
US11428642B2Aug 30, 2022
Scanning scatterometry overlay measurement
KLA CORP12 citations86
US11300405B2Apr 12, 2022
Grey-mode scanning scatterometry overlay metrology
KLA CORP7 citations86
US11573497B2Feb 7, 2023
System and method for measuring misregistration of semiconductor device wafers utilizing induced topography
KLA CORP5 citations85
US11346657B2May 31, 2022
Measurement modes for overlay
KLA CORP7 citations85
US11164307B1Nov 2, 2021
Misregistration metrology by using fringe Moiré and optical Moiré effects
KLA CORP18 citations85
US10942135B2Mar 9, 2021
Radial polarizer for particle detection
KLA CORP9 citations85
US10921261B2Feb 16, 2021
Strontium tetraborate as optical coating material
KLA CORP11 citations85
US11300524B1Apr 12, 2022
Pupil-plane beam scanning for metrology
KLA CORP12 citations84
US11237455B2Feb 1, 2022
Frequency conversion using stacked strontium tetraborate plates
KLA CORP6 citations84
US10948423B2Mar 16, 2021
Sensitive particle detection with spatially-varying polarization rotator and polarizer
KLA CORP7 citations84
US11531275B1Dec 20, 2022
Parallel scatterometry overlay metrology
KLA CORP9 citations83
US11356594B1Jun 7, 2022
Tilted slit confocal system configured for automated focus detection and tracking
KLA CORP9 citations83
US11114491B2Sep 7, 2021
Back-illuminated sensor and a method of manufacturing a sensor
KLA CORP8 citations83
US11378394B1Jul 5, 2022
On-the-fly scatterometry overlay metrology target
KLA CORP7 citations80
US11468553B2Oct 11, 2022
System and method for determining type and size of defects on blank reticles
KLA CORP7 citations78
US12253805B2Mar 18, 2025
Scatterometry overlay metrology with orthogonal fine-pitch segmentation
KLA CORP2 citations75
US11800212B1Oct 24, 2023
Multi-directional overlay metrology using multiple illumination parameters and isolated imaging
KLA CORP5 citations74
US11782411B2Oct 10, 2023
System and method for mitigating overlay distortion patterns caused by a wafer bonding tool
KLA CORP5 citations74
US11355375B2Jun 7, 2022
Device-like overlay metrology targets displaying Moiré effects
KLA CORP6 citations74
US12117347B2Oct 15, 2024
Metrology target design for tilted device designs
KLA CORP2 citations73
US11961219B2Apr 16, 2024
Generative adversarial networks (GANs) for simulating specimen images
KLA CORP2 citations73
US11906770B2Feb 20, 2024
Monolithic optical retarder
KLA CORP2 citations73
US11841621B2Dec 12, 2023
Moiré scatterometry overlay
KLA CORP2 citations73
US11698251B2Jul 11, 2023
Methods and systems for overlay measurement based on soft X-ray Scatterometry
KLA CORP2 citations73
US11631169B2Apr 18, 2023
Inspection of noisy patterned features
KLA CORP2 citations73
US11573077B2Feb 7, 2023
Scatterometry based methods and systems for measurement of strain in semiconductor structures
KLA CORP4 citations73
US11476144B2Oct 18, 2022
Single cell in-die metrology targets and measurement methods
KLA CORP2 citations73
US11450521B2Sep 20, 2022
Laser sustained plasma light source with high pressure flow
KLA CORP5 citations73
US11416982B2Aug 16, 2022
Controlling a process for inspection of a specimen
KLA CORP2 citations73
US11335608B2May 17, 2022
Electron beam system for inspection and review of 3D devices
KLA CORP2 citations73
US11328410B2May 10, 2022
Deep generative models for optical or other mode selection
KLA CORP2 citations73
US11309202B2Apr 19, 2022
Overlay metrology on bonded wafers
KLA CORP5 citations73
US11221300B2Jan 11, 2022
Determining metrology-like information for a specimen using an inspection tool
KLA CORP2 citations73
US11137350B2Oct 5, 2021
Mid-infrared spectroscopy for measurement of high aspect ratio structures
KLA CORP2 citations73
US11113827B2Sep 7, 2021
Pattern-to-design alignment for one-dimensional unique structures
KLA CORP2 citations73
US11056312B1Jul 6, 2021
Micro stigmator array for multi electron beam system
KLA CORP6 citations73
US10922808B2Feb 16, 2021
File selection for test image to design alignment
KLA CORP3 citations73
US12066322B2Aug 20, 2024
Single grab overlay measurement of tall targets
KLA CORP2 citations72
US12032300B2Jul 9, 2024
Imaging overlay with mutually coherent oblique illumination
KLA CORP2 citations72
US11899375B2Feb 13, 2024
Massive overlay metrology sampling with multiple measurement columns
KLA CORP2 citations72
US11796925B2Oct 24, 2023
Scanning overlay metrology using overlay targets having multiple spatial frequencies
KLA CORP6 citations72
US11776108B2Oct 3, 2023
Deep learning based defect detection
KLA CORP2 citations72
US11567391B1Jan 31, 2023
Frequency conversion using interdigitated nonlinear crystal gratings
KLA CORP5 citations72
US11551348B2Jan 10, 2023
Learnable defect detection for semiconductor applications
KLA CORP5 citations72
US11543732B2Jan 3, 2023
Frequency conversion using stacked strontium tetraborate plates
KLA CORP2 citations72
US11532566B2Dec 20, 2022
Misregistration target having device-scaled features useful in measuring misregistration of semiconductor devices
KLA CORP2 citations72
Showing the top 50 of 491 patents by PatentIndex Score.