Assignee
KLA INSTR CORP
US·47 granted patents·11 pending applications·9,054 citations·filing 1978–2008
Top patents by PatentIndex Score
58 records- 0199US5889593AOptical system and method for angle-dependent reflection or transmission measurementKLA INSTR CORP·Filed 1997·Granted Mar 30, 1999·451 cites·38 claims
- 0299US5717518ABroad spectrum ultraviolet catadioptric imaging systemKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·243 cites·20 claims
- 0399US5572598AAutomated photomask inspection apparatusKLA INSTR CORP·Filed 1994·Granted Nov 5, 1996·294 cites·49 claims
- 0498US5563702AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1994·Granted Oct 8, 1996·386 cites·41 claims
- 0598US5112129AMethod of image enhancement for the coherence probe microscope with applications to integrated circuit metrologyKLA INSTR CORP·Filed 1990·Granted May 12, 1992·306 cites·14 claims
- 0698US4818110AMethod and apparatus of using a two beam interference microscope for inspection of integrated circuits and the likeKLA INSTR CORP·Filed 1986·Granted Apr 4, 1989·275 cites·16 claims
- 0798US4247203AAutomatic photomask inspection system and apparatusKLA INSTR CORP·Filed 1978·Granted Jan 27, 1981·281 cites·29 claims
- 0897US5822055AOptical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detectionKLA INSTR CORP·Filed 1997·Granted Oct 13, 1998·297 cites·36 claims
- 0997US5717204AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Feb 10, 1998·148 cites·8 claims
- 1097US4532650APhotomask inspection apparatus and method using corner comparator defect detection algorithmKLA INSTR CORP·Filed 1983·Granted Jul 30, 1985·254 cites·25 claims
- 1197US4347001AAutomatic photomask inspection system and apparatusKLA INSTR CORP·Filed 1979·Granted Aug 31, 1982·157 cites·3 claims
- 1296US6079256AOverlay alignment measurement of wafersKLA INSTR CORP·Filed 1998·Granted Jun 27, 2000·237 cites·6 claims
- 1396US5737072AAutomated photomask inspection apparatus and methodKLA INSTR CORP·Filed 1996·Granted Apr 7, 1998·221 cites·41 claims
- 1496US5665968AInspecting optical masks with electron beam microscopyKLA INSTR CORP·Filed 1996·Granted Sep 9, 1997·120 cites·2 claims
- 1596US5537669AInspection method and apparatus for the inspection of either random or repeating patternsKLA INSTR CORP·Filed 1993·Granted Jul 16, 1996·224 cites·30 claims
- 1696US5438413AProcess for measuring overlay misregistration during semiconductor wafer fabricationKLA INSTR CORP·Filed 1993·Granted Aug 1, 1995·180 cites·12 claims
- 1796US4877326AMethod and apparatus for optical inspection of substratesKLA INSTR CORP·Filed 1988·Granted Oct 31, 1989·263 cites·56 claims
- 1896US4845558AMethod and apparatus for detecting defects in repeated microminiature patternsKLA INSTR CORP·Filed 1987·Granted Jul 4, 1989·247 cites·14 claims
- 1995US5991699ADetecting groups of defects in semiconductor feature spaceKLA INSTR CORP·Filed 1997·Granted Nov 23, 1999·435 cites·42 claims
- 2095US5578821AElectron beam inspection system and methodKLA INSTR CORP·Filed 1995·Granted Nov 26, 1996·421 cites·51 claims
- 2195US5502306AElectron beam inspection system and methodKLA INSTR CORP·Filed 1994·Granted Mar 26, 1996·400 cites·35 claims
- 2295US4805123AAutomatic photomask and reticle inspection method and apparatus including improved defect detector and alignment sub-systemsKLA INSTR CORP·Filed 1986·Granted Feb 14, 1989·369 cites·52 claims
- 2395US4755874AEmission microscopy systemKLA INSTR CORP·Filed 1987·Granted Jul 5, 1988·219 cites·27 claims
- 2495US4644172AElectronic control of an automatic wafer inspection systemKLA INSTR CORP·Filed 1984·Granted Feb 17, 1987·278 cites·8 claims
- 2595US4633504AAutomatic photomask inspection system having image enhancement meansKLA INSTR CORP·Filed 1984·Granted Dec 30, 1986·154 cites·7 claims
- 2695US4618938AMethod and apparatus for automatic wafer inspectionKLA INSTR CORP·Filed 1984·Granted Oct 21, 1986·247 cites·25 claims
- 2795US4579455APhotomask inspection apparatus and method with improved defect detectionKLA INSTR CORP·Filed 1983·Granted Apr 1, 1986·280 cites·17 claims
- 2894US6078386AInspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sourcesKLA INSTR CORP·Filed 1998·Granted Jun 20, 2000·140 cites·24 claims
- 2994US5031976ACatadioptric imaging systemKLA INSTR CORP·Filed 1990·Granted Jul 16, 1991·144 cites·25 claims
- 3094US4926489AReticle inspection systemKLA INSTR CORP·Filed 1987·Granted May 15, 1990·311 cites·42 claims
- 3193US4556317AX-Y Stage for a patterned wafer automatic inspection systemKLA INSTR CORP·Filed 1984·Granted Dec 3, 1985·112 cites·18 claims
- 3293US4555798AAutomatic system and method for inspecting hole qualityKLA INSTR CORP·Filed 1983·Granted Nov 26, 1985·180 cites·28 claims
- 3393US4448532AAutomatic photomask inspection method and systemKLA INSTR CORP·Filed 1981·Granted May 15, 1984·127 cites·10 claims
- 3490US6133576ABroad spectrum ultraviolet inspection methods employing catadioptric imagingKLA INSTR CORP·Filed 1997·Granted Oct 17, 2000·66 cites·11 claims
- 3587US5030008AMethod and apparatus for the automated analysis of three-dimensional objectsKLA INSTR CORP·Filed 1988·Granted Jul 9, 1991·97 cites·31 claims
- 3687US4639587AAutomatic focusing system for a microscopeKLA INSTR CORP·Filed 1985·Granted Jan 27, 1987·81 cites·20 claims
- 3786US6141038AAlignment correction prior to image sampling in inspection systemsKLA INSTR CORP·Filed 1997·Granted Oct 31, 2000·82 cites·28 claims
- 3886US4758094AProcess and apparatus for in-situ qualification of master patterns used in patterning systemsKLA INSTR CORP·Filed 1987·Granted Jul 19, 1988·72 cites·51 claims
- 3977US6021214AInspection method and apparatus for the inspection of either random or repeating patternsKLA INSTR CORP·Filed 1995·Granted Feb 1, 2000·83 cites·4 claims
- 4074US4845373AAutomatic alignment apparatus having low and high resolution optics for coarse and fine adjustingKLA INSTR CORP·Filed 1986·Granted Jul 4, 1989·51 cites·8 claims
- 4170US5640237AMethod and apparatus for detecting non-uniformities in reflective surafacesKLA INSTR CORP·Filed 1995·Granted Jun 17, 1997·44 cites·22 claims
- 4270US4647764ARotational and focusing apparatus for turret mounted lensesKLA INSTR CORP·Filed 1984·Granted Mar 3, 1987·26 cites·22 claims
- 4367US4604910AApparatus for accurately positioning an object at each of two locationsKLA INSTR CORP·Filed 1984·Granted Aug 12, 1986·21 cites·7 claims
- 4461US2008285023A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2008·Application pending·0 cites
- 4558US2007076198A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2006·Application pending·0 cites
- 4658US2007291257A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2007·Application pending·0 cites
- 4756US2006146319A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2006·Application pending·0 cites
- 4855US5956174ABroad spectrum ultraviolet catadioptric imaging systemKLA INSTR CORP·Filed 1998·Granted Sep 21, 1999·12 cites·35 claims
- 4955US2005162645A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2005·Application pending·0 cites
- 5054US2004223146A1Optical inspection of a specimen using multi-channel responses from the specimenKLA INSTR CORP·Filed 2004·Application pending·0 cites
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