Assignee
KLA TENCOR
US22 patents
Top patents by PatentIndex Score
US6771806B1Aug 3, 2004
Multi-pixel methods and apparatus for analysis of defect information from test structures on semiconductor devices
KLA TENCOR258 citations99
US6633174B1Oct 14, 2003
Stepper type test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR195 citations99
US6636064B1Oct 21, 2003
Dual probe test structures for semiconductor integrated circuits
KLA TENCOR127 citations98
US6529621B1Mar 4, 2003
Mechanisms for making and inspecting reticles
KLA TENCOR135 citations98
US6524873B1Feb 25, 2003
Continuous movement scans of test structures on semiconductor integrated circuits
KLA TENCOR102 citations98
US7655482B2Feb 2, 2010
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR91 citations97
US7179661B1Feb 20, 2007
Chemical mechanical polishing test structures and methods for inspecting the same
KLA TENCOR68 citations97
US6586733B1Jul 1, 2003
Apparatus and methods for secondary electron emission microscope with dual beam
KLA TENCOR46 citations96
US6566885B1May 20, 2003
Multiple directional scans of test structures on semiconductor integrated circuits
KLA TENCOR57 citations96
US6528818B1Mar 4, 2003
Test structures and methods for inspection of semiconductor integrated circuits
KLA TENCOR60 citations96
US7106895B1Sep 12, 2006
Method and apparatus for inspecting reticles implementing parallel processing
KLA TENCOR122 citations95
US6748103B2Jun 8, 2004
Mechanisms for making and inspecting reticles
KLA TENCOR45 citations95
US6628397B1Sep 30, 2003
Apparatus and methods for performing self-clearing optical measurements
KLA TENCOR68 citations95
US6066849AMay 23, 2000
Scanning electron beam microscope
KLA TENCOR103 citations95
US6671051B1Dec 30, 2003
Apparatus and methods for detecting killer particles during chemical mechanical polishing
KLA TENCOR49 citations92
US6516085B1Feb 4, 2003
Apparatus and methods for collecting global data during a reticle inspection
KLA TENCOR30 citations92
US6362923B1Mar 26, 2002
Lens for microscopic inspection
KLA TENCOR36 citations90
US6664546B1Dec 16, 2003
In-situ probe for optimizing electron beam inspection and metrology based on surface potential
KLA TENCOR49 citations89
US6581193B1Jun 17, 2003
Apparatus and methods for modeling process effects and imaging effects in scanning electron microscopy
KLA TENCOR61 citations85
US7102749B2Sep 5, 2006
Overlay alignment mark design
KLA TENCOR6 citations74
US7486393B2Feb 3, 2009
Multiple beam inspection apparatus and method
KLA TENCOR2 citations62
US7724939B2May 25, 2010
Method and apparatus for inspecting reticles implementing parallel processing
KLA TENCOR3 citations60