Assignee
KLA TENCOR CORP
US1,510 patents
Top patents by PatentIndex Score
US7068833B1Jun 27, 2006
Overlay marks, methods of overlay mark design and methods of overlay measurements
KLA TENCOR CORP81 citations99
US6886153B1Apr 26, 2005
Design driven inspection or measurement for semiconductor using recipe
KLA TENCOR CORP135 citations99
US6639662B2Oct 28, 2003
Sample inspection system
KLA TENCOR CORP85 citations99
US6611330B2Aug 26, 2003
System for measuring polarimetric spectrum and other properties of a sample
KLA TENCOR CORP120 citations99
US6608676B1Aug 19, 2003
System for detecting anomalies and/or features of a surface
KLA TENCOR CORP159 citations99
US6462818B1Oct 8, 2002
Overlay alignment mark design
KLA TENCOR CORP192 citations99
US6268916B1Jul 31, 2001
System for non-destructive measurement of samples
KLA TENCOR CORP174 citations99
US6215551B1Apr 10, 2001
Scanning system for inspecting anomalies on surfaces
KLA TENCOR CORP151 citations99
US6208411B1Mar 27, 2001
Massively parallel inspection and imaging system
KLA TENCOR CORP173 citations99
US6201601B1Mar 13, 2001
Sample inspection system
KLA TENCOR CORP359 citations99
US6184984B1Feb 6, 2001
System for measuring polarimetric spectrum and other properties of a sample
KLA TENCOR CORP145 citations99
US6137570AOct 24, 2000
System and method for analyzing topological features on a surface
KLA TENCOR CORP161 citations99
US6104835AAug 15, 2000
Automatic knowledge database generation for classifying objects and systems therefor
KLA TENCOR CORP158 citations99
US6064517AMay 16, 2000
High NA system for multiple mode imaging
KLA TENCOR CORP135 citations99
US6020957AFeb 1, 2000
System and method for inspecting semiconductor wafers
KLA TENCOR CORP205 citations99
US5917594AJun 29, 1999
Spectroscopic measurement system using an off-axis spherical mirror and refractive elements
KLA TENCOR CORP159 citations99
US5883710AMar 16, 1999
Scanning system for inspecting anomalies on surfaces
KLA TENCOR CORP209 citations99
US5798829AAug 25, 1998
Single laser bright field and dark field system for detecting anomalies of a sample
KLA TENCOR CORP258 citations99
US9222895B2Dec 29, 2015
Generalized virtual inspector
KLA TENCOR CORP96 citations98
US8929406B2Jan 6, 2015
193NM laser and inspection system
KLA TENCOR CORP63 citations98
US7957066B2Jun 7, 2011
Split field inspection system using small catadioptric objectives
KLA TENCOR CORP55 citations98
US7933026B2Apr 26, 2011
High resolution monitoring of CD variations
KLA TENCOR CORP178 citations98
US7929667B1Apr 19, 2011
High brightness X-ray metrology
KLA TENCOR CORP191 citations98
US7897942B1Mar 1, 2011
Dynamic tracking of wafer motion and distortion during lithography
KLA TENCOR CORP56 citations98
US7877722B2Jan 25, 2011
Systems and methods for creating inspection recipes
KLA TENCOR CORP80 citations98
US7478019B2Jan 13, 2009
Multiple tool and structure analysis
KLA TENCOR CORP225 citations98
US6707540B1Mar 16, 2004
In-situ metalization monitoring using eddy current and optical measurements
KLA TENCOR CORP162 citations98
US6590656B2Jul 8, 2003
Spectroscopic scatterometer system
KLA TENCOR CORP172 citations98
US6433561B1Aug 13, 2002
Methods and apparatus for optimizing semiconductor inspection tools
KLA TENCOR CORP159 citations98
US6081325AJun 27, 2000
Optical scanning system for surface inspection
KLA TENCOR CORP279 citations98
US5948972ASep 7, 1999
Dual stage instrument for scanning a specimen
KLA TENCOR CORP129 citations98
US10352695B2Jul 16, 2019
X-ray scatterometry metrology for high aspect ratio structures
KLA TENCOR CORP68 citations97
US8362425B2Jan 29, 2013
Multiple-beam system for high-speed electron-beam inspection
KLA TENCOR CORP68 citations97
US7873204B2Jan 18, 2011
Method for detecting lithographically significant defects on reticles
KLA TENCOR CORP56 citations97
US7826071B2Nov 2, 2010
Parametric profiling using optical spectroscopic systems
KLA TENCOR CORP114 citations97
US7756658B2Jul 13, 2010
Systems and methods for detecting defects on a wafer and generating inspection results for the wafer
KLA TENCOR CORP62 citations97
US7656528B2Feb 2, 2010
Periodic patterns and technique to control misalignment between two layers
KLA TENCOR CORP60 citations97
US7352457B2Apr 1, 2008
Multiple beam inspection apparatus and method
KLA TENCOR CORP66 citations97
US6816570B2Nov 9, 2004
Multi-technique thin film analysis tool
KLA TENCOR CORP84 citations97
US6804003B1Oct 12, 2004
System for analyzing surface characteristics with self-calibrating capability
KLA TENCOR CORP97 citations97
US6691052B1Feb 10, 2004
Apparatus and methods for generating an inspection reference pattern
KLA TENCOR CORP127 citations97
US6636301B1Oct 21, 2003
Multiple beam inspection apparatus and method
KLA TENCOR CORP113 citations97
US6576923B2Jun 10, 2003
Inspectable buried test structures and methods for inspecting the same
KLA TENCOR CORP117 citations97
US6509197B1Jan 21, 2003
Inspectable buried test structures and methods for inspecting the same
KLA TENCOR CORP146 citations97
US6445199B1Sep 3, 2002
Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures
KLA TENCOR CORP106 citations97
US6433541B1Aug 13, 2002
In-situ metalization monitoring using eddy current measurements during the process for removing the film
KLA TENCOR CORP161 citations97
US6363166B1Mar 26, 2002
Automated photomask inspection apparatus
KLA TENCOR CORP94 citations97
US6271916B1Aug 7, 2001
Process and assembly for non-destructive surface inspections
KLA TENCOR CORP278 citations97
US6267005B1Jul 31, 2001
Dual stage instrument for scanning a specimen
KLA TENCOR CORP119 citations97
US6248988B1Jun 19, 2001
Conventional and confocal multi-spot scanning optical microscope
KLA TENCOR CORP426 citations97
Showing the top 50 of 1,510 patents by PatentIndex Score.